
| Nominal accelerating voltage | 5 kV |
| Electron gun | Schottky field emission gun |
| Specimen size | standard Ø 3.05 mm TEM grids |
| Specimen movement | x, y: ± 1 mm | z: ± 0.3 mm |
| Tilt holder | ± 22° |
| Specimen exchange time | approx. 3 min |
| VACUUM | |
| AIRLOCK SYSTEM | |
| Diaphragm and turbomolecular pump | 10-5 mbar |
| OBJECT SPACE | |
| Ion getter pump | 10-7 mbar |
| ELECTRON GUN | |
| Ion getter pump | 10-9 mbar |
| BASIC TEM MODEL | ||
| Projection lens | Electrostatic single lens | |
| Resolving power | 2.0 nm | |
| Total magnification | 2,200 – 230,000× | |
| TEM BOOST | ||
| Projection lens | Electrostatic double lens | |
Resolving power | 1.2 nm | |
| Total magnification | 1,400 – 700,000× | |
| ELECTRON DIFFRACTION | ||
| Minimum probe size | Minimum probe size 100 nm | |
| Camera | CCD | sCMOS |
| Camera length (binning 1x1) | 2,100 pixels | 2,390 pixels |
| Camera constant (binning 1x1) | 36.3 nm pixels | 41.3 nm pixels |
| STEM | ||
| Resolving power | 2.0 nm | |
| Maximum magnification | 250,000× | |
| Maximum field of view | 25 × 25 μm | |
| SEM (BSE DETECTOR ) | ||
| Resolving power | 4,0 nm | |
| Maximum magnification | 100,000× | |
| Maximum field of view | 200 × 200 μm | |
| SCAN IMAGE CAPTURE | ||
| up to 2,048 × 2,048 pxls / 8 bits | ||
| TEM IMAGE CAPTURE | ||
| TEM Basic model | TEM Boost model | |
| Camera | CCD | sCMOS |
| Sensor size | 2,048 × 2,048 pixels | 2,560 × 2,160 pixels |
| Digitization | 12-bits | 16-bits |
| MICROSCOPE UNIT | |
| Weight | 25 kg |
| Dimensions (w × d × h) | 296 × 440 × 690 mm |
| AIRLOCK PUMPING STATION | |
| Weight | 17 kg |
| Dimensions (w × d × h) | 300 × 300 × 355 mm |
ELECTRONICS UNIT | |
| Weight | 19 kg |
| Dimensions (w × d × h) | 470 × 270 × 290 mm |


| POWER CONSUMPTION | |
| Standby mode | 40 VA |
| Operation consumption | 300 VA |
| Maximum consumption | 810 VA |
| MAINS CONNECTION | |
| Voltage / frequency | 100–240 V / 50–60Hz |
| INSTALLATION BENEFITS | |
| No cooling water needed | |
| Only single phase plug needed |